Surface acoustic wave device

ABSTRACT

A surface acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode on the substrate, a cover over the substrate and IDT electrode, and hollow spaces between the IDT electrode and the cover. The hollow spaces are defined by partition supports between the substrate and the cover. The partition supports include a first and second partition supports extending in a first direction without contacting each other. The first and second partition supports each include first and second ends along the first direction. The first and second direction perpendicular to the first direction. The first end of the first partition support is closer to an outer periphery of the substrate than is the second end, and the first end of the second partition support is farther away from the outer periphery than is the second end.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of priority to Japanese Patent Application No. 2015-252619 filed on Dec. 24, 2015. The entire contents of this application are hereby incorporated herein by reference.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to surface acoustic wave devices, and more particularly, to a surface acoustic wave device having a wafer level package (WLP) structure.

2. Description of the Related Art

Surface acoustic wave devices are used as band pass filters in wireless sections, such as radio-frequency (RF) stages and intermediate-frequency (IF) stages, of mobile communication terminals. In recent years, wireless sections in personal digital assistants (PDAs), such as cellular phones and smartphones, have been modularized, and accordingly, there has been a need for a reduction in the size and height of surface acoustic wave devices. Thus, packaging technologies for surface acoustic wave devices have been improved, and a WLP technology has been proposed in which a chip of a surface acoustic wave device is directly used as a package. In a surface acoustic wave device, interdigital transducer (IDT) electrodes are provided on a piezoelectric substrate, and the surface acoustic wave device is packaged so that a hollow space is provided above the IDT electrodes. In a WLP-type surface acoustic wave device, a piezoelectric substrate is directly used as a package that includes a hollow space.

In modularization of wireless sections in PDAs, such as cellular phones and smartphones, there is a need to modularize such wireless sections by sealing them with a resin in order to protect them against external stress and moisture. When an entire module is sealed with a resin (e.g., transfer molding), high pressure is applied to individual components that are sealed with the resin, and accordingly, there is a need for a method for allowing a surface acoustic wave device having a hollow space inside thereof to be capable of withstanding such high pressure and to be capable of withstanding a mold resin that tries to enter the surface acoustic wave device (i.e., a method for allowing the surface acoustic wave device to have mold resistance or pressure resistance and to have a lamination property or a sealing property).

In the related art, as a technology that ensures the mold resistance and the lamination property of a surface acoustic wave device, a technology for providing a partition-support layer (inner support layer), which functions as a spacer, in a hollow space has been proposed (see, for example, Japanese Patent No. 5141852). In Japanese Patent No. 5141852, the mold resistance of a surface acoustic wave device is ensured by disposing a partition-support layer, which is made of a resin, at a center portion of a hollow space so as to be vertically arranged between a piezoelectric substrate and a cover layer that define the hollow space.

Here, in order to further improve the mold resistance, providing a partition-support layer, which extends in the lateral and longitudinal directions when the piezoelectric substrate is viewed in plan, in the hollow space may be considered. FIG. 7 is a layout view of a hollow space of a surface acoustic wave device according to a reference example (a diagram when a piezoelectric substrate is viewed in plan). FIG. 7 illustrates a piezoelectric substrate 11, on which IDT electrodes (not illustrated) have been provided, outer-periphery-frame support layers 20 a to 20 d which cover the periphery of the piezoelectric substrate 11, partition-support layers 22 a to 22 c, which are disposed so as to partition the hollow space, and columnar electrodes 17 a to 17 h. Each of the partition-support layers 22 a to 22 c is vertically arranged on the piezoelectric substrate 11 in a region in which the IDT electrodes are not disposed, and the partition-support layers 22 a to 22 c support, together with the outer-periphery-frame support layers 20 a to 20 d, a cover layer (not illustrated) that defines a ceiling of the hollow space. When the piezoelectric substrate 11 is viewed in plan, the partition-support layer 22 c has a substantially crank shape extending so as to partition the hollow space in the longitudinal and lateral directions. As a result, reinforcement strength with respect to the cover layer may be enhanced, and the mold resistance of the surface acoustic wave device may be improved, whereas if all the partition-support layers 22 a to 22 c extend in only one direction, the reinforcement strength with respect to the cover layer would not be enhanced, and the mold resistance of the surface acoustic wave device would not be improved.

However, in the case where the partition-support layer 22 c having a substantially crank shape, such as that illustrated in FIG. 7 is provided, when the cover layer, which is made of a resin, is attached to the outer-periphery-frame support layers 20 a to 20 d and the partition-support layers 22 a to 22 c from above, wrinkles are generated in a portion of the cover layer that is brought into contact with a crank portion of the partition-support layer 22 c, and the partition-support layer 22 c is embedded into the cover layer. As a result, the portion of the cover layer in contact with the crank portion of the partition-support layer 22 c, is crushed. For example, when attaching a cover layer, which has been rolled, to the partition-support layer 22 a, the partition-support layer 22 b, and the partition-support layer 22 c in this order while stretching the cover layer, when the cover layer is attached to the partition-support layer 22 c, wrinkles are generated in the cover layer, and the cover layer is crushed. As a result, problems occur in that a portion having a reduced thickness is locally provided in the cover layer, or breakage occurs locally in the cover layer, so that the mold resistance and the lamination property of the surface acoustic wave device will not be ensured, and the reliability of the surface acoustic wave device will not be ensured as a result of the wrinkles, which have been generated in the cover layer, being in contact with the IDT electrodes or wiring electrodes.

SUMMARY OF THE INVENTION

Preferred embodiments of the present invention provide a surface acoustic wave device having a wafer level package (WLP) structure whose mold resistance, lamination property, and reliability are improved and ensured.

A surface acoustic wave device according to a preferred embodiment of the present invention includes a piezoelectric substrate including a main surface, at least one interdigital transducer electrode on the main surface, a cover over the piezoelectric substrate and the at least one interdigital transducer electrode, and a plurality of hollow spaces between the at least one interdigital transducer electrode and the cover. The hollow spaces are defined, at least in part, by a plurality of partition supports interposed between the piezoelectric substrate and the cover. The plurality of partition supports include a first partition support and a second partition support that, from a plan view, extend in a first direction across the piezoelectric substrate without contacting each other, such that the first partition support includes a first end and a second end along an first axis parallel or substantially parallel to the first direction, and the second partition support includes a first end and a second end along a second axis parallel or substantially parallel to the first direction. Relative to the plurality of partition supports, the first and second partition supports are adjacent to one another in a second direction that is perpendicular or substantially perpendicular to the first direction. The first and second partition supports are offset, such that, along the first axis, the first end of the first partition support is closer to an outer periphery of the piezoelectric substrate than the second end of the first partition support is to the outer periphery of the piezoelectric substrate, and, along the second axis, the first end of the second partition support is farther away from the outer periphery of the piezoelectric substrate than the second end of the second partition support is to the outer periphery of the piezoelectric substrate.

In various preferred embodiments of the present invention, a WLP-type surface acoustic wave device, whose mold resistance, lamination property, and reliability are further improved, is provided.

The above and other elements, features, steps, characteristics and advantages of the present invention will become more apparent from the following detailed description of the preferred embodiments with reference to the attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating a surface acoustic wave device according to a preferred embodiment of the present invention.

FIG. 2A is a cross-sectional view of the surface acoustic wave device obtained by cutting the surface acoustic wave device in a plane including line IIA-IIA of FIG. 1 .

FIG. 2B is a cross-sectional view of the surface acoustic wave device obtained by cutting the surface acoustic wave device in a plane including line IIB-IIB of FIG. 1 .

FIG. 3 is a layout view of a hollow space of the surface acoustic wave device illustrated in FIG. 1 .

FIGS. 4A to 4F are diagrams illustrating a process of manufacturing the surface acoustic wave device according to a preferred embodiment of the present invention.

FIGS. 5A to 5C are diagrams illustrating examples of the positional relationship between a first partition-support layer and a second partition-support layer that are included in the surface acoustic wave device according to a preferred embodiment of the present invention.

FIG. 6 is a cross-sectional view of a surface acoustic wave device according to a modification of a preferred embodiment of the present invention.

FIG. 7 is a layout view of a hollow space of a surface acoustic wave device according to a reference example.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the preferred embodiments, which will be described below, are preferred specific examples of the present invention. Numerical values, shapes, materials, components, arrangement positions and connection configurations of the components, steps, the order of the steps, and other features that are described in the following preferred embodiments are examples and are not intended to limit the scope of the present invention.

FIG. 1 is a diagram illustrating a surface acoustic wave device 10 according to a preferred embodiment of the present invention. As viewed in FIG. 1 , the right direction will be referred to as a first direction (positive X-axis direction), and a direction towards the front side and that is perpendicular to the first direction will be referred to as a second direction (positive Y-axis direction).

The surface acoustic wave device 10 has a wafer level package (WLP) structure and is preferably, for example, a transmission filter, a reception filter, a duplexer, or other suitable surface acoustic wave device. The surface acoustic wave device 10 includes a hollow space 19 inside thereof, and the hollow space 19 is surrounded by a piezoelectric substrate 11, an outer-periphery-frame support layer 20 that is disposed so as to be vertically arranged at an outer peripheral portion of the piezoelectric substrate 11, and a cover layer 16 that is disposed on the outer-periphery-frame support layer 20. When the piezoelectric substrate 11 is viewed in plan, the overall shape of the surface acoustic wave device 10 is preferably rectangular or substantially rectangular defined by the X-axis direction and the Y-axis direction. Solder bumps 18 a to 18 h are exposed upward at the cover layer 16. The surface acoustic wave device 10 is typically soldered to a mounting substrate (not illustrated) while being turned upside down from the state illustrated in FIG. 1 with the solder bumps 18 a to 18 h interposed therebetween.

FIG. 2A is a cross-sectional view of the surface acoustic wave device 10 obtained by cutting the surface acoustic wave device in a plane including line IIA-IIA of FIG. 1 . FIG. 2B is a cross-sectional view of the surface acoustic wave device 10 obtained by cutting the surface acoustic wave device in a plane including line IIB-IIB of FIG. 1 .

The surface acoustic wave device 10 includes the piezoelectric substrate 11, IDT electrodes 12, wiring patterns 12 a, terminal electrodes 13, wiring electrodes 14, a protective film 15, the cover layer 16, columnar electrodes 17, solder bumps 18, the outer-periphery-frame support layer 20, and partition-support layers 21.

Preferably, the piezoelectric substrate 11 is a piezoelectric body that defines a substrate of the surface acoustic wave device 10 and is made of, for example, a piezoelectric single crystal, such as lithium tantalate (LiTaO₃), lithium niobate (LiNbO₃), or quartz crystal, or a piezoelectric ceramic.

Each of the IDT electrodes 12 is a pair of comb-shaped or substantially comb-shaped electrodes that is disposed on a main surface (top surface) of the piezoelectric substrate 11 and that excites a surface acoustic wave. For example, each of the IDT electrodes 12 is preferably made of a metal, such as Ti, Al, Cu, Au, Pt, Ag, Pd, or Ni, or an alloy, or is defined by a multilayer body including at least one of the above-mentioned metals or an alloy.

The wiring patterns 12 a are conductive patterns that connect the plurality of IDT electrodes 12 and connect the IDT electrodes 12 and the terminal electrodes 13 to one another, and the wiring patterns 12 a are preferably made of, for example, a material similar to that of the IDT electrodes 12.

The terminal electrodes 13 are electrodes that are connected to the IDT electrodes 12 and are each disposed at an outer peripheral portion of the main surface of the piezoelectric substrate 11, and the terminal electrodes 13 are preferably made of, for example, a material similar to that of the IDT electrodes 12.

The wiring electrodes 14 are electrodes that are disposed on the terminal electrodes 13 and that define portions of a wiring path connecting the IDT electrodes 12 and the outside of the surface acoustic wave device 10 to each other, and the wiring electrodes 14 are preferably made of, for example, a material similar to that of the IDT electrodes 12.

The protective film 15 is a layer that covers the IDT electrodes 12 in order to protect the IDT electrodes 12 and is preferably made of, for example, a dielectric material, such as silicon oxide or silicon nitride.

The outer-periphery-frame support layer 20 is vertically arranged in a region of the main surface of the piezoelectric substrate 11 other than a region in which the IDT electrodes 12 have been disposed. The outer-periphery-frame support layer 20 is one of support layers, each of which has a height larger than the height of each of the IDT electrodes 12, and is vertically arranged around the periphery of the region in which the IDT electrodes 12 have been disposed. The outer-periphery-frame support layer 20 is preferably made of, for example, a material including at least one of a polyimide, an epoxy resin, benzocyclobutene (BCB), polybenzoxazole (PBO), a metal, and silicon oxide. Note that, although the outer-periphery-frame support layer 20 is vertically arranged on the protective film 15 in the present preferred embodiment, the outer-periphery-frame support layer 20 may be vertically arranged directly on the piezoelectric substrate 11 or may be vertically arranged on the wiring patterns 12 a that is provided on the piezoelectric substrate 11.

Each of the partition-support layers 21 is vertically arranged in a region of the main surface of the piezoelectric substrate 11 other than the region in which the IDT electrodes 12 are disposed. Each of the partition-support layers 21 is one of the support layers, each of which has a height larger than the height of each of the IDT electrodes 12, and is vertically arranged in a region surrounded by the outer-periphery-frame support layer 20. Each of the partition-support layers 21 is preferably made of, for example, a material similar to that of the outer-periphery-frame support layer 20. Note that, although the partition-support layers 21 are vertically arranged on the protective film 15, which covers the wiring patterns 12 a, in the present preferred embodiment, the partition-support layers 21 may be vertically arranged directly on the wiring patterns 12 a without the protective film 15 interposed therebetween or may be vertically arranged directly on the piezoelectric substrate 11.

The cover layer 16 is a layer that is disposed on the support layers (outer-periphery-frame support layer 20 and partition-support layers 21) and that covers the IDT electrodes 12 with the hollow space 19 interposed therebetween and preferably has a multilayer structure including a lower layer that is made of for example, a material including at least one of an epoxy resin, urethane, phenol, a polyester, BCB, and PBO and an upper layer that is made of for example, a material including at least one of a polyimide, an epoxy resin, BCB, PBO, silicon, a silicon oxide, LiTaO₃, and LiNbO₃.

The columnar electrodes 17 are electrodes that define portions of a wiring path connecting the wiring electrodes 14 and the outside to each other and that extend through the outer-periphery-frame support layer 20 and the cover layer 16, and the columnar electrodes 17 are preferably made of, for example, a material similar to that of the IDT electrodes 12.

The solder bumps 18 are connecting electrodes each having a protruding shape that are used to solder the surface acoustic wave device 10 to the mounting substrate (not illustrated), and the solder bumps 18 are preferably made of, for example, a material similar to that of the IDT electrodes 12 or solder.

FIG. 3 is a layout view of the hollow space 19 of the surface acoustic wave device 10 illustrated in FIG. 1 . Here, in order to simplify FIG. 3 , the IDT electrodes 12 and other elements are not illustrated, and FIG. 3 illustrates only the piezoelectric substrate on which the IDT electrodes 12 are provided, the outer-periphery-frame support layers 20 a to 20 d covering the periphery of the piezoelectric substrate 11, the partition-support layers 21 a to 21 g that partition the hollow space 19, and the columnar electrodes 17 a to 17 h.

The outer-periphery-frame support layers 20 a to 20 d are components of the outer-periphery-frame support layer 20 illustrated in FIG. 1 and define a rectangular or substantially rectangular shape surrounding the region of the main surface of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed. Note that regions 11 a to 11 c of the main surface of the piezoelectric substrate 11, each of which is surrounded by one of three dashed line frames in FIG. 3 , respectively correspond to a reception filter, an intermediate region positioned between the reception filter and a transmission filter, and the transmission filter where the surface acoustic wave device 10 is a duplexer, for example.

The partition-support layers 21 a to 21 g are specific examples corresponding to the partition-support layers 21 illustrated in FIG. 2B and are vertically arranged in the region of the main surface of the piezoelectric substrate 11 surrounded by the outer-periphery-frame support layer 20. The partition-support layers 21 a to 21 g are a plurality of partition-support layers, and when the piezoelectric substrate 11 is viewed in plan, the plurality of partition-support layers extend so as to be straight or substantially straight in the first direction (positive X-axis direction), which is parallel or substantially parallel to the main surface of the piezoelectric substrate 11, and are arranged in the second direction (positive Y-axis direction), which is parallel or substantially parallel to the main surface of the piezoelectric substrate 11 and which is perpendicular to the first direction (positive X-axis direction). In other words, the partition-support layers 21 a to 21 g extend so as to be straight or substantially straight in the first direction (positive X-axis direction). That is to say, only partition-support layers that are parallel or substantially parallel to one another are provided as the partition-support layers 21 a to 21 g.

However, preferably, the partition-support layers 21 a to 21 g are not arranged at an equal pitch in the Y-axis direction and do not have the same width in the Y-axis direction. For example, among the gaps between adjacent ones of the partition-support layers 21 a to 21 g, the gap between the partition-support layer 21 c and the partition-support layer 21 d is the largest, and the gap between the first partition-support layer 21 f and the second partition-support layer 21 g is the smallest. Regarding the widths of the partition-support layers 21 a to 21 g, for example, the widths of the partition-support layer 21 a and the partition-support layer 21 d are preferably equal or substantially equal to each other and are the largest, and the widths of the partition-support layer 21 b, the partition-support layer 21 c, the first partition-support layer 21 f, and the second partition-support layer 21 g are preferably equal or substantially equal to one another and are the smallest. The widths of the partition-support layers 21 a to 21 g are set while being limited by the size and the position of a region in which the IDT electrodes 12 are not disposed and, for example, to distribute reinforcement strength, which corresponds to the mold resistance, in the hollow space 19 as uniformly as possible.

In the present preferred embodiment, the partition-support layers 21 a to 21 g preferably do not extend to (are not in contact with) the outer-periphery-frame support layers 20 a to 20 d in order to make the internal pressure of the hollow space 19 uniform or substantially uniform by maintaining the hollow space 19 as a single space.

Here, a characteristic configuration of the present preferred embodiment is that the plurality of partition-support layers 21 a to 21 g include the first partition-support layer 21 f and the second partition-support layer 21 g that are adjacent to each other in the arrangement of the plurality of partition-support layers 21 a to 21 g and that have characteristics described below.

While the piezoelectric substrate 11 is viewed in plan, when an end of the first partition-support layer 21 f and an end of the second partition-support layer 21 g on the first direction (positive X-axis direction) side are respectively referred to as first ends 21 fr and 21 gr, and an end of the first partition-support layer 21 f and an end of the second partition-support layer 21 g on a direction (negative X-axis direction) side, the direction being opposite to the first direction, are respectively referred to as second ends 21 f 1 and 21 g 1, the following two relationships are satisfied.

(1) The distance from the first end 21 fr of the first partition-support layer 21 f to the outer-periphery-frame support layer 20 d, which is closest to the first end 21 fr, is smaller than the distance from the second end 21 f 1 of the first partition-support layer 21 f to the outer-periphery-frame support layer 20 b, which is closest to the second end 21 f 1.

(2) The distance from the first end 21 gr of the second partition-support layer 21 g to the outer-periphery-frame support layer 20 d, which is closest to the first end 21 gr, is larger than the distance from the second end 21 g 1 of the second partition-support layer 21 g to the outer-periphery-frame support layer 20 b, which is closest to the second end 21 g 1.

The above two relationships indicate that the first partition-support layer 21 f and the second partition-support layer 21 g have a structure that is obtained by removing only a longitudinal portion (portion extending in the Y-axis direction) of the crank portion from the partition-support layer 22 c according to the above-described reference example, which has a crank shape or a substantially crank shape, (the first partition-support layer 21 f and the second partition-support layer 21 g are arranged so as to be offset with respect to each other). As a result, the plurality of partition-support layers 21 a to 21 g extend in the same or substantially the same direction (first direction) while maintaining mold resistance at the same or substantially the same mold resistance of the partition-support layer 22 c having a crank shape or a substantially crank shape. Therefore, the probability of occurrence of a problem in that, when the cover layer 16, which is made of a resin or other suitable material, is attached to the outer-periphery-frame support layers 20 a to 20 d and the partition-support layers 21 a to 21 g from above, wrinkles are generated in the cover layer 16, and one of the partition-support layers is embedded into the cover layer 16 is reduced. This results in a reduction in the probability of a portion having a small thickness being provided locally in the cover layer 16, and the cover layer 16 is attached to the outer-periphery-frame support layers 20 a to 20 d and the partition-support layers 21 a to 21 g from above while maintaining the uniform thickness of the cover layer 16, so that the mold resistance, the lamination property, and the reliability are ensured. In addition, since the longitudinal portion (portion extending in the second direction) of the crank portion is removed from the partition-support layer 22 c according to the reference example, which has a crank shape or a substantially crank shape, the region of the piezoelectric substrate 11 in which the IDT electrodes 12 are to be disposed (electrode-design area) is increased by an amount equal or substantially equal to the longitudinal portion.

In addition, when the piezoelectric substrate 11 is viewed in plan, each of the first partition-support layer 21 f and the second partition-support layer 21 g does not need to have a long length so as to divide the hollow space 19 into two spaces and may have a small length (preferably a length half or approximately half of the length of the hollow space 19 in the X-axis direction in the present preferred embodiment), and thus, the probability of the region of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed becoming narrow is reduced.

FIGS. 4A to 4F are diagrams illustrating a non-limiting example of a process of manufacturing the surface acoustic wave device 10 according to a preferred embodiment of the present invention.

First, as illustrated in FIG. 4A, after the IDT electrodes 12, the wiring patterns 12 a, and the terminal electrodes 13 have been formed on the main surface of the piezoelectric substrate 11 by a vacuum deposition method or other suitable method using a photolithography technique, for example, the wiring electrodes 14 are formed on the terminal electrodes 13 by a method similar to the above-described method. Then, the protective film 15, which covers the main surface of the piezoelectric substrate 11, the IDT electrodes 12, and the wiring patterns 12 a, is formed by sputtering or other suitable method using a photolithography technique.

Next, as illustrated in FIG. 4B, the support layers (outer-periphery-frame support layer 20 and partition-support layers 21) are formed into films using a photolithography technique so as to be vertically arranged in a region of the main surface of the piezoelectric substrate 11 other than the region in which the IDT electrodes 12 are disposed. In this case, the film deposition process for the support layers continues until the height of each of the support layers is larger than the height of each of the IDT electrodes 12.

Next, as illustrated in FIG. 4C, the cover layer 16, which has been rolled, is attached to the support layers (outer-periphery-frame support layer 20 and partition-support layers 21) from above and is fixed onto the support layers by being pressed against the support layers. For example, in the structure illustrated in FIG. 3 , the cover layer 16 is preferably attached to and fixed onto the outer-periphery-frame support layer 20 a, the partition-support layer 21 a, the partition-support layer 21 b, the partition-support layer 21 c, the partition-support layer 21 d, the first partition-support layer 21 f, the second partition-support layer 21 g, the partition-support layer 21 e, and the outer-periphery-frame support layer 20 c so as to be in contact with these layers by being pressed against the layers in the second direction. Here, when the cover layer 16 is attached to the first partition-support layer 21 f and the second partition-support layer 21 g, since the first partition-support layer 21 f and the second partition-support layer 21 g have a structure obtained by removing only the longitudinal portion (portion extending in the Y-axis direction) of the crank portion from the partition-support layer 22 c according to the reference example, which has a crank shape or a substantially crank shape, (the first partition-support layer 21 f and the second partition-support layer 21 g are arranged so as to be offset with respect to each other), the probability of the occurrence of a problem in that wrinkles are generated in the cover layer 16 and that one of the partition-support layers is embedded into the cover layer 16 is significantly reduced.

Next, as illustrated in FIG. 4D, through holes 17 i are formed by removing portions of the cover layer 16 and portions of the outer-periphery-frame support layer 20 by, for example, radiating a laser beam onto the cover layer 16 and the outer-periphery-frame support layer 20, and the wiring electrodes 14 are exposed.

Next, as illustrated in FIG. 4E, the columnar electrodes 17 with which the through holes 17 i are filled are formed by, for example, performing electrolytic plating.

Finally, as illustrated in FIG. 4F, the solder bumps 18 are bonded to the columnar electrodes 17 by, for example, being pressed against the columnar electrodes 17.

Note that, the above-described process is performed on a base material of the piezoelectric substrate 11 in order to manufacture a plurality of surface acoustic wave devices 10 at the same time, and at the end of the process, the surface acoustic wave devices 10 are isolated from one another by, for example, cutting with a dicing machine the surface acoustic wave devices 10 into individual devices.

The WLP-type surface acoustic wave device 10 according to the present preferred embodiment preferably is manufactured through a process, such as the non-limiting example of a manufacturing method described above.

The surface acoustic wave device 10 according to the present preferred embodiment manufactured in the manner described above has the following characteristics. The surface acoustic wave device 10 includes the piezoelectric substrate 11, the IDT electrodes 12, each of which is disposed on the main surface of the piezoelectric substrate 11 and each of which excites a surface acoustic wave, the support layers (outer-periphery-frame support layer 20 and partition-support layers 21), each of which is vertically arranged in a region of the main surface of the piezoelectric substrate 11 other than the region in which the IDT electrodes 12 are disposed, and each of which has a height larger than the height of each of the IDT electrodes 12, and the cover layer 16, which is disposed on the support layers and which covers the IDT electrodes 12 with the hollow space 19 interposed therebetween. The support layers include the outer-periphery-frame support layers 20 a to 20 d, which are vertically arranged around the periphery of the region of the main surface of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed, and the plurality of partition-support layers 21 a to 21 g that are vertically arranged in the region of the main surface of the piezoelectric substrate 11, the region being surrounded by the outer-periphery-frame support layers 20 a to 20 d, the plurality of partition-support layers 21 a to 21 g extending, when the piezoelectric substrate 11 is viewed in plan, so as to be straight or substantially straight in the first direction (positive X-axis direction), which is parallel or substantially parallel to the main surface of the piezoelectric substrate 11, and being arranged in the second direction (positive Y-axis direction), which is parallel or substantially parallel to the main surface of the piezoelectric substrate 11 and which is perpendicular or substantially perpendicular to the first direction (positive X-axis direction). The plurality of partition-support layers 21 a to 21 g include the first partition-support layer 21 f and the second partition-support layer 21 g, which are adjacent to each other in the arrangement of the plurality of partition-support layers 21 a to 21 g and which have the characteristics described below. While the piezoelectric substrate 11 is viewed in plan, when the end of the first partition-support layer 21 f and the end of the second partition-support layer 21 g oriented in the first direction (positive X-axis direction) are respectively referred to as the first ends 21 fr and 21 gr, and the end of the first partition-support layer 21 f and the end of the second partition-support layer 21 g oriented in the direction opposite to the first direction (positive X-axis direction) are respectively referred to as the second ends 21 f 1 and 21 g 1, (1) the distance from the first end 21 fr of the first partition-support layer 21 f to the outer-periphery-frame support layer 20 d, which is closest to the first end 21 fr, is smaller than the distance from the second end 21 f 1 of the first partition-support layer 21 f to the outer-periphery-frame support layer 20 b, which is closest to the second end 21 f 1, and (2) the distance from the first end 21 gr of the second partition-support layer 21 g to the outer-periphery-frame support layer 20 d, which is closest to the first end 21 gr, is larger than the distance from the second end 21 g 1 of the second partition-support layer 21 g to the outer-periphery-frame support layer 20 b, which is closest to the second end 21 g 1.

Accordingly, the first partition-support layer 21 f and the second partition-support layer 21 g have a structure, which is obtained by removing only the longitudinal portion (portion extending in the Y-axis direction) of the crank portion from the partition-support layer 22 c according to the reference example, which has a crank shape or a substantially crank shape, (the first partition-support layer 21 f and the second partition-support layer 21 g are offset with respect to each other), and thus, the plurality of partition-support layers 21 a to 21 g extend in the same direction (first direction) while maintaining a mold resistance the same or substantially the same as the mold resistance of the partition-support layer 22 c having a crank shape or a substantially crank shape. Therefore, the probability of the occurrence of the problem in that, when the cover layer 16, which is made of a resin or other suitable material, is attached to the outer-periphery-frame support layers 20 a to 20 d and the partition-support layers 21 a to 21 g from above, wrinkles are generated in the cover layer 16, and that one of the partition-support layers is embedded into the cover layer 16 is reduced. This results in a reduction in the probability of a portion having a small thickness being provided locally in the cover layer 16. In addition, the cover layer 16 is attached to the outer-periphery-frame support layers 20 a to 20 d and the partition-support layers 21 a to 21 g from above while maintaining the uniform thickness of the cover layer 16, and the mold resistance, the lamination property, and the reliability are ensured during a sealing operation using a resin, such as transfer molding. Furthermore, since the longitudinal portion (portion extending in the second direction) of the crank portion is removed from the partition-support layer 22 c according to the reference example, which has a crank shape or a substantially crank shape, the region of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed (electrode-design area) is increased by an amount equal or substantially equal to the longitudinal portion.

When the piezoelectric substrate 11 is viewed in plan, each of the first partition-support layer 21 f and the second partition-support layer 21 g does not need to have a long length so as to divide the hollow space 19 into two spaces and may have a small length (preferably a length approximately half of the length of the hollow space 19 in the X-axis direction in the present preferred embodiment), and thus, the probability of the region of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed becoming narrow is reduced.

Note that, in the layout illustrated in FIG. 3 , although the second end 21 f 1 of the first partition-support layer 21 f and the first end 21 gr of the second partition-support layer 21 g extend to the same or substantially the same position in the X-axis direction when viewed from the second direction (positive Y-axis direction), the positional relationship between the first partition-support layer 21 f and the second partition-support layer 21 g in the first direction (positive X-axis direction) is not limited to this relationship.

FIGS. 5A-5C is a diagram illustrating examples of the positional relationship between the first partition-support layer 21 f and the second partition-support layer 21 g, which are included in the surface acoustic wave device 10 according to a present preferred embodiment.

In FIG. 5A, when viewed from the second direction (positive Y-axis direction), a portion of the first partition-support layer 21 f and a portion of the second partition-support layer 21 g are preferably superposed with each other in the X-axis direction. Accordingly, since the first partition-support layer 21 f and the second partition-support layer 21 g include the portions which are superposed with each other in the X-axis direction when viewed from the second direction (positive Y-axis direction), the mold resistance is further improved as compared to a case where the first partition-support layer 21 f and the second partition-support layer 21 g do not include portions that are superposed with each other.

Note that it is preferable that the length (superposed width) of a region in which the portion of the first partition-support layer 21 f and the portion of the second partition-support layer 21 g are superposed with each other in the first direction (positive X-axis direction) be about 30 μm or smaller, for example. This is because, if the region in which the portion of the first partition-support layer 21 f and the portion of the second partition-support layer 21 g are superposed with each other is too large, the region of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed would be reduced.

In FIG. 5B, when viewed from the second direction (positive Y-axis direction), preferably, the first partition-support layer 21 f and the second partition-support layer 21 g extend such that the second end 21 f 1 of the first partition-support layer 21 f and the first end 21 gr of the second partition-support layer 21 g are located at the same or substantially the same position in the X-axis direction. This layout is the same as that illustrated in FIG. 3 .

In FIG. 5C, when viewed from the second direction (positive Y-axis direction), preferably, the first partition-support layer 21 f and the second partition-support layer 21 g are separated from each other by a predetermined distance in the X-axis direction.

Accordingly, since the first partition-support layer 21 f and the second partition-support layer 21 g are separated from each other by the predetermined distance in the X-axis direction when viewed from the second direction (positive Y-axis direction), a larger region of the piezoelectric substrate 11 in which the IDT electrodes 12 are disposed is ensured compared with the case where the first partition-support layer 21 f and the second partition-support layer 21 g are not separated from each other.

Note that it is preferable that the predetermined distance be about 30 μm or smaller, for example. This is because, if the predetermined distance is too large, the mold resistance would not be ensured.

Note that the surface acoustic wave device according to the present invention is not limited to the structure described in the preferred embodiment described above and may include the columnar electrodes 17 that are exposed. FIG. 6 is a cross-sectional view of a surface acoustic wave device 10 a according to a modification of a preferred embodiment of the present invention. In the surface acoustic wave device 10 a, the columnar electrodes 17 are exposed, and solder bumps are not provided on the columnar electrodes 17. Advantageous effects similar to those of the above-described preferred embodiment are able to be obtained by providing a first partition-support layer 21 f and a second partition-support layer 21 g, which are similar to those of the above-described preferred embodiment, in the surface acoustic wave device 10 a. In the surface acoustic wave device 10 a, since the outer-periphery-frame support layer 20 and the cover layer 16 are not disposed on exposed portions of the columnar electrodes 17, a reduction in the size of the surface acoustic wave device 10 a is able to be achieved. In addition, since solder bumps are not provided on the columnar electrodes 17, a further reduction in the height of the surface acoustic wave device 10 a is able to be achieved. Furthermore, when mounting the surface acoustic wave device 10 a, the surface acoustic wave device 10 a is able to be connected to a mounting substrate not only via top surfaces of the columnar electrodes 17 but also via side surfaces of the columnar electrodes 17, and thus, the mounting strength of the surface acoustic wave device 10 a is able to be improved.

Although surface acoustic wave devices according to the present invention have been described with reference to preferred embodiments and modifications thereof, the present invention is not limited thereto. Other preferred embodiments obtained by making various modifications devised by those skilled in the art to the preferred embodiments and the modifications or obtained by combining some of the components in the preferred embodiments and the modifications are also included in the scope of the present invention.

For example, in the above-described preferred embodiments, although only one pair of the first partition-support layer 21 f and the second partition-support layer 21 g, which have the above-described characteristics (1) and (2), preferably are provided in the surface acoustic wave device 10 as illustrated in FIG. 3 , two or more pairs of the first partition-support layer 21 f and the second partition-support layer 21 g may be provided.

In the above-described preferred embodiments, although the first partition-support layer 21 f and the second partition-support layer 21 g are preferably arranged in this order in the second direction (positive Y-axis direction), these layers may be arranged in reverse order (in the order of the second partition-support layer 21 g and the first partition-support layer 21 f).

In the above-described preferred embodiments, although the first partition-support layer 21 f and the second partition-support layer 21 g preferably are positioned in the region 11 c, in which the transmission filter is provided, the positions of the layers are not limited to these positions, and the first partition-support layer 21 f and the second partition-support layer 21 g may be positioned in the region 11 a, in which the reception filter is provided, or in the region 11 b, which corresponds to the intermediate region.

In the above-described preferred embodiments, although the first partition-support layer 21 f and the second partition-support layer 21 g preferably extend from a position near the outer-periphery-frame support layer 20 to the center or substantially the center of the hollow space 19 in the X-axis direction, the first partition-support layer 21 f and the second partition-support layer 21 g are not limited to this arrangement. Each of the first partition-support layer 21 f and the second partition-support layer 21 g may extend to a position that is closer to the outer-periphery-frame support layer 20 than to the center of the hollow space 19 in the X-axis direction (e.g., a position that is spaced apart from the outer-periphery-frame support layer 20 by an amount equal to approximately one fourth of the size of the hollow space 19 in the X-axis direction).

In the above-described preferred embodiments, although the partition-support layers 21 a to 21 g preferably are arranged so as not to extend to (so as not to be in contact with) the outer-periphery-frame support layers 20 a to 20 d, the present invention is not limited to this configuration. A first end and/or a second end of at least one of the partition-support layers 21 a to 21 g may extend to (may be in contact with) the outer-periphery-frame support layers 20 a to 20 d.

In the above-described preferred embodiments, although FIG. 3 illustrates the layout of the partition-support layers 21 a to 21 g in the case where the surface acoustic wave device 10 is a duplexer, the surface acoustic wave device 10 is not limited to a duplexer and may be any type of filter as long as the filter is a WLP-type SAW device.

Preferred embodiments of the present invention can be applied to WLP-type surface acoustic wave devices, and more particularly, to a surface acoustic wave device whose mold resistance, lamination property, and reliability are favorable (e.g., a surface acoustic wave device that is included in a wireless module in a PDA).

While preferred embodiments of the present invention have been described above, it is to be understood that variations and modifications will be apparent to those skilled in the art without departing from the scope and spirit of the present invention. The scope of the present invention, therefore, is to be determined solely by the following claims. 

What is claimed is:
 1. A surface acoustic wave device comprising: a piezoelectric substrate including a main surface; at least one interdigital transducer electrode on the main surface; a cover over the piezoelectric substrate and the at least one interdigital transducer electrode; and a plurality of hollow spaces between the at least one interdigital transducer electrode and the cover; wherein the plurality of hollow spaces are defined, at least in part, by a plurality of partition supports interposed between the piezoelectric substrate and the cover; the plurality of partition supports include a first partition support and a second partition support that, from a plan view, extend in a first direction across the piezoelectric substrate without contacting each other, such that the first partition support includes a first end and a second end along an first axis parallel or substantially parallel to the first direction, and the second partition support includes a first end and a second end along a second axis parallel or substantially parallel to the first direction; relative to the plurality of partition supports, the first and second partition supports are adjacent to one another in a second direction that is perpendicular or substantially perpendicular to the first direction; and the first and second partition supports are offset, such that, along the first axis, the first end of the first partition support is closer to an outer periphery of the piezoelectric substrate than the second end of the first partition support is to the outer periphery of the piezoelectric substrate, and, along the second axis, the first end of the second partition support is farther away from the outer periphery of the piezoelectric substrate than the second end of the second partition support is to the outer periphery of the piezoelectric substrate.
 2. The surface acoustic wave device according to claim 1, wherein the plurality of partition supports include a third partition support spaced apart from the first and second partition supports in the second direction; and of the plurality of partition supports, the third partition support has a largest width in the second direction.
 3. The surface acoustic wave device according to claim 2, wherein a portion of the first partition support and a portion of the second partition support are superposed with each other when viewed from the second direction.
 4. The surface acoustic wave device according to claim 3, wherein a region in which the portion of the first partition support and the portion of the second partition support are superposed with each other has a length of about 30 μm or less in the first direction.
 5. The surface acoustic wave device according to claim 4, wherein at least one of the first and second ends of the first and second partition supports does not extend to the outer periphery of the piezoelectric substrate.
 6. The surface acoustic wave device according to claim 5, wherein a distance in the second direction between the first and second partition supports among distances in the second direction between the plurality of partition supports is smallest.
 7. The surface acoustic wave device according to claim 6, wherein a reception filter and a transmission filter are defined by the at least one interdigital transducer electrode; an intermediate region is disposed between the reception filter and the transmission filter; and a fourth partition support of the plurality of partition supports is disposed in the intermediate region.
 8. The surface acoustic wave device according to claim 1, wherein the first partition support and the second partition support are separated from each other by a distance in the first direction when viewed from the second direction.
 9. The surface acoustic wave device according to claim 8, wherein at least one of the first and second partition supports extends to the outer periphery of the piezoelectric substrate.
 10. The surface acoustic wave device according to claim 8, wherein the plurality of partition supports include a third partition support spaced apart from the first and second partition supports in the second direction; and the third partition support has a largest width in the second direction of the plurality of partition supports.
 11. The surface acoustic wave device according to claim 10, wherein a reception filter and a transmission filter are defined by the at least one interdigital transducer electrode; an intermediate region is disposed between the reception filter and the transmission filter; and a fourth partition support of the plurality of partition supports is disposed in the intermediate region.
 12. The surface acoustic wave device according to claim 1, wherein when viewed from the second direction, the second end of the first partition support and the first end of the second partition support are disposed at a same or substantially a same position in the first direction.
 13. The surface acoustic wave device according to claim 1, wherein the plurality of partition supports include a third partition support and a fourth partition support that, from the plan view, extend in the first direction across the piezoelectric substrate without contacting each other, such that the third partition support includes a first end and a second end along a third axis parallel or substantially parallel to the first direction, and the fourth partition support includes a first end and a second end along a fourth axis parallel or substantially parallel to the first direction; relative to the plurality of partition supports, the third and fourth partition supports are adjacent to one another in the second direction; and the third and fourth partition supports are offset, such that, along the first axis, the first end of the third partition support is closer to the outer periphery of the piezoelectric substrate than the second end of the third partition support is to the outer periphery of the piezoelectric substrate, and, along the second axis, the first end of the fourth partition support is farther away from the outer periphery of the piezoelectric substrate than the second end of the fourth partition support is to the outer periphery of the piezoelectric substrate.
 14. The surface acoustic wave device according to claim 13, wherein the plurality of partition supports include a fifth partition support spaced apart from the first, second, third, and fourth partition supports in the second direction; and of the plurality of partition supports, the fifth partition support has a largest width in the second direction.
 15. The surface acoustic wave device according to claim 14, wherein the first partition support and the second partition support are separated from each other by a distance in the first direction when viewed from the second direction; and a portion of the third partition support and a portion of the fourth partition support are superposed with each other when viewed from the second direction.
 16. The surface acoustic wave device according to claim 15, wherein a region in which the portion of the third partition support and the portion of the fourth partition support are superposed with each other has a length of about 30 μm or less in the first direction.
 17. The surface acoustic wave device according to claim 16, wherein none of the first, second, third, and fourth partition supports extend to the outer periphery of the piezoelectric substrate.
 18. The surface acoustic wave device according to claim 17, wherein a reception filter and a transmission filter are defined by the at least one interdigital transducer electrode; an intermediate region is disposed between the reception filter and the transmission filter; and a sixth partition support of the plurality of partition supports is disposed in the intermediate region.
 19. The surface acoustic wave device according to claim 14, wherein the first partition support and the second partition support are separated from each other by a first distance in the first direction when viewed from the second direction; and the third partition support and the fourth partition support are separated from each other by a second distance in the first direction when viewed from the second direction.
 20. The surface acoustic wave device according to claim 19, wherein at least one of the first, second, third, and fourth partition supports extends to the outer periphery of the piezoelectric substrate.
 21. The surface acoustic wave device according to claim 20, wherein a reception filter and a transmission filter are defined by the at least one interdigital transducer electrode; an intermediate region is disposed between the reception filter and the transmission filter; and a sixth partition support of the plurality of partition supports is disposed in the intermediate region. 